Extending CMP Equipment Life with Quality Parts & Service
Trusted CMP Experts
Serving Fabs and Research Facilities Worldwide
ISO 9001:2015 certified team of CMP equipment experts who deliver OEM-quality service, parts, and refurbishments without the delays, red tape, or markups of larger corporations. With a 14,000-square-foot facility in Chandler, Arizona — complete with an ISO 7 cleanroom — we provide fast, reliable support that keeps your tools running and your production schedules on track.
Stocked Spare Parts
Zyon Technologies carries an extensive inventory for many spare parts across the following tool sets:
✔ Applied Materials (Mirra / Mirra Mesa / Reflexion)
✔ Speedfam IPEC (372 – 776)
✔ Auriga / Auriga C / EC
✔ OnTrak (Lam Series 0–III, Synergy, Integra)
✔ Strasbaugh 6EC / 6EG Series
Part Refurbishment
Providing Refurbishment services for a range of tool components including but not limited to:
Gearboxes, polish arms, flipper boxes, platens, and bearings.
HCLU, X-Track, and sweep assemblies
Robotic Systems inluding Genmark, Equipe, Asyst, Waskawa / Motoman, and Hine
Components are rebuilt to OEM specifications, tested, and documented for traceability and reliability.
Engineering and Sustaining Services
Offering design and upgrade solutions that extend equipment life and reduce maintenance costs. Our team can provide custom upgrades to improve reliability and performance to support customer production goals.