Solutions for Semiconductor Filtration

Cost Effective & Reliable

Advanced solutions for semiconductor filtration systems for gases, slurries, ultra-pure water, etching fluids, and chemical purification. The comprehensive product line includes PP and PFA housings, all-PTFE and disposable filters, and proprietary membrane cartridges (PTFE, PES, PVDF, UPE, PP) available in pore sizes from 5 nm to 10 µm. Every product undergoes 100% integrity testing and meets high cleanliness standards, with customized filtration solutions and stainless-steel housings available to optimize performance, reduce defects, and enhance productivity.

Capsule Filters

Policap POU Compact CMP


The pure PP material, compact structure, and disposable nature offer advantages of low cost and easy replacement. It can accommodate either wound or pleated filter cartridges, which can be selected based on the filtration scenario. With multiple interface options and the convenient capsule-style design for easy replacement, it is widely used in low-flow applications across various industries, such as semiconductor CMP processes.

Policap-Plus POU CMP


The PoliCap-Plus point-of-use(POU) series are specially designed capsule filters for advanced CMP applications, especially for CMP slurry containing collodal SiO2, CeO2 and ultrafine Al2O3 abrasives. Structurally, the convenient disposable design allows for quick installation, minimizing slurry exposure and wastage. The PoliCap-Plus series capsule The PoliCap-Plus cartridge can be used with a variety of different interfaces to meet the needs of dfferent applications.

PhotoPure-PR


The PhotoPure-PR series filters are designed for terminal filtration of photoresists and inks. The triple-port capsule design ensures clean and convenient use and replacement of filters. Compatible with different filter membranes and removal ratings, it meets various filtration requirements.

EPC/EHC


EPC/EHC Series Capsule Filter includes various filtering media, removal ratings, filtering area, and adaptor types and sizes to meet different operating conditions. The Capsule Filter is thermally welded into the housing without any adhesive, ensuring no risk of fiber shedding. This compact structure is easy to replace, reducing operator contact with solvents during operation and significantly enhancing safety.

Pleated Filter Cartidges

Nylon Cartridges


The Nylon pleated filter cartridge is made of natural hydrophilic nylon filter membrane and HDPE material components. It is processed and formed through hot melt welding technology in a Class 100 clean environment, without any adhesives or surfactants. It has the characteristics of high flow rate, high retention efficiency, and high organic cleanliness.

PES Cartridges


The Polyether Sulfone (PES) pleated filter cartridge is a high-performance filter cartridge composed of hydrophilic asymmetric PES membrane and diversion support layer. It has the characteristics of high filtration accuracy, high flux, long service life, low dissolution and particle shedding, good chemical stability and thermal stability. It provides high-purity HDPE and PP component material selection according to different application scenarios. Membrane Solutions PES pleated filter cartridge, based on the original high-performance PES membrane, has been finely designed for different application scenarios, forming different sub-series to meet the needs of different customers, such as PF series, Clean-Nova series, Clean-Gard series, SteriPure-E series, SteriPure-S series, etc. The characteristics and applications of each series are different, and we can choose the appropriate PES pleated filter cartridge according to your needs.

PTFE Cartridges


The polytetrafluoroethylene (PTFE) pleated filter cartridge is made of high porosity PTFE membrane, with high flow rate and long service life, extremely low risk of dissolution and particle shedding and good chemical resistance. It provides high-purity PFA, HDPE, PP component material selection according to different application scenarios, as well as hydrophobic, hydrophilic and semi hydrophilic PTFE filter membranes to choose from. Membrane Solutions PTFE pleated filter cartridge has been finely designed for different application scenarios, forming different sub-series to meet the needs of different customers, such as AfsPure series, All Fluorine series, Wet-Fluoride series, Wet-Vast series, Wet-Mega series, FBG series, etc. The characteristics and applications of each series are different, and we can choose the appropriate PTFE pleated filter cartridge according to your needs.

UPE Cartridges


The ultra-high molecular weight polyethylene (UPE) pleated filter cartridge is made by pleating a dense hydrophobic UPE filter membrane. Its skeleton and support layer are made of HDPE material, which has excellent corrosion resistance and chemical resistance. It has extremely low metal ion precipitation, low particle shedding, and pollutant removal performance.

Depth Filter Cartridges

String Would Filter


The string wound filter cartridge is made of cotton wire, PP or glass fiber wire precisely wound on the porous skeleton (PP or stainless steel) according to a specific process, which has a honeycomb structure with a sparse outside and a dense inside. It can effectively remove suspended matter, particles, rust and other impurities in the fluid, and has very excellent filtration performance.

CMPro-L PP Winded Depth Filter


The CMPro-L series of deep filter cartridges are made of a composite structure of polypropylene filter media, prepared for the filtration of CMP slurry delivery systems (SDS). Its unique gradient design makes it well suited to meet the challenges of chemical mechanical polishing (CMP) slurry filtration. The tapered pore structure gives CMPro-L a good balance between excellent particle interception efficiency and high dirt-holding capacity. It effectively removes damaging large particles from CMP slurry and maintains the same effective particle size distribution (PSD) before and after filtrarion. CMPro-L can meet a wide range of different CMP application scenarios, including oxide CMP, shallow trench segregation CMP and metal wiring CMP.

CMPro-D High Precision PP Melt Blown


The CMPro-D series depth filter has been developed to effectively remove agglomerated particles and gels in all kinds of chemical mechanical polishing(CMP) slurry, while keeping valid abrasive remained and particle distribution unchanged. Unique 3D composite structure has been utilized to manufacture graded depth polypropylene medium with tapered pores. The outer section(upstream) is consisted of continuous melt blown media that maximize contaminant holding capacity, contributes to long service life and effectively lower cost. The inner section(downstream) is consisted of nano fiber wrapped media that provide excellent removal efficiency and reliable filtration.

Stainless Steel Gas Filters

Max Series PFA SS Gas Filter


The stainless steel Max series is designed for ultra-high purity and high flow gas filtration, with a flow range of 0-1000slpm and a filtration accuracy of 0.003μm. Internally, it adopts a perfluorinated filter element with excellent chemical compatibility, which can be used for filtering gases in all semiconductor processes.

P Type PP SS Gas Filter


The stainless steel P Type Series is designed specifically for bulk gases and provides cost-effective filtration solutions for non critical processes, with a filtration accuracy of up to .003μm. Commonly used for fltering process gases such as compressed air, nitrogen, and inert gases.

Normal Series PP SS Gas Filter


The stainless steel Normal series is designed specifically for bulk gases and provides cost-effective filtration solutions for non critical processes, with a filtretion accuracy of up to 0.003μm. Commonly used for filtering process gases such as compressed air, nitrogen, and inert gases.

DP SS Gas Filter


The DP series stainless steel gasket-type gas filter cartridges are compactly designed, making them ideal for gas distribution systems in semiconductor processes. Featuring a 316 stainless steel housing and a core made of high-strength metal sintered elements with uniform porosity, they are well-suited for filtering large particles in high-temperature environments of up to 400°C. With a variety of connector options, they can easily adapt to different standard piping systems.

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